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Induction heating
is particularly suitable for the
production of ultra-pure materials,
such as the thin films and crystals
often used in solid-state and laser
technology. The ability to provide
high temperatures, localize heat,
and operate in a controlled atmosphere
are crucial for crystal growing,
semiconductor applications and other
high-tech requirements.
Crystal
Growing
Lepel offers a line of power supplies specially designed
and adapted for crystal growing applications,
the LCG line. Highly
accurate feedback restart and override circuitry, coupled
with other reliability features, allow uninterrupted system
operation even through periodic power
line disturbances.
Plus, the frequency can be selected
to contain the magnetic field inside
the crucible wall, thus minimizing
or eliminating stirring.
Epitaxial
Deposition
Lepel provides a line of power supplies
to be used in the epitaxial deposition
field for any substrate size, from
less than 1" (25mm) to more
than 30" (760 mm) diameter
susceptors.
Coils are modeled by a computer
program for optimum temperature
distribution across the susceptor.
Zone
Refining
Induction heating is ideal for horizontal
zone processing, in which multiple
coil arrangements can produce several
molten zones simultaneously in one
ingot. Horizontal zone processing
is widely used for relatively unreactive
materials, which can be melted without
contamination in graphite or ceramic
boats. More reactive materials are
processed with the floating zone
method.
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